Spectroscopic Ellipsometer UVISEL 2

The ultimate solution to every challenge in thin-film measurement.

  • includes the widest range of integrated automated features;
  • broad spectral range – from 190 to 2100 nm;
  • the best solution for most problems of the thin films analysis.

HORIBA Scientific has invented the new generation of scientific spectroscopic ellipsometer that delivers the highest level of performance for nano and micro layer characterization.

The UVISEL 2 includes the widest range of integrated automated features useful for the investigation of all material family.

The UVISEL 2 features a patented sample vision coupled with automated spot selection for accurate positioning of the measurement spot and region on the sample.

The UVISEL 2 integrates the world’s smallest patented achromatic spot size of 35μm capable of covering a large spectral range from FUV to NIR for measurement of very small sample areas.

Driven by the DeltaPsi2 software, the UVISEL 2 is simple to operate and has the performance required characterizing all current materials as well as the next generation materials and structures.

HORIBA Scientific started with what has proven to be the most accurate and sensitive ellipsometer, the UVISEL, and redesigned and improved everything to deliver an instrument with a remarkably higher specification than any other instrument.

Characteristic Point

Standard Configuration:

Light source

150 W Xenon

Spectral range

190 - 880 nm
(NIR extension up to 2100 nm)

Spot size

Automated achromatic microspots,
8 sizes down to 35 μm (at normal incidence)

Monochromator

Double monochromator
For FUV-VIS range: Twin PMT detectors
For NIR extension: InGaAs detector

Sample stage

200 mm x 200 mm, automatic XYZ adjustment,
vacuum chucks, Z height 35 mm,
automated autofocus and tilt alignment

Sample viewing

Vision system using CCD camera
Field of view: 6.5 x 3.5 mm at 70°

Goniometer

Automatic variable angle from 35° to 90°

Options:

Accessories

Temperature controlled cell, liquid cell
Electrochemical cell, sealed cell, rotation stage,

Ellipsometer table base

Dimension (WxDxH): 1084 x 984 x 802 mm

Performance:

Tests performed on

NIST 1000Å SiO2/Si

Accuracy

d: σ = 0.25Å - n(632.8 nm): σ = 0.0002

Repeatability

d ± 0.25 Å - n(632.8 nm) ± 0.0002

Facility Requirements:

Power supply

110/220 VAC, 400 W, 50/60 Hz

Dimension (WxDxH)

1084 x 984 x 802 mm




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