HORIBA Scientific has invented the new generation of scientific spectroscopic ellipsometer that delivers the highest level of performance for nano and micro layer characterization.
The UVISEL 2 includes the widest range of integrated automated features useful for the investigation of all material family.
The UVISEL 2 features a patented sample vision coupled with automated spot selection for accurate positioning of the measurement spot and region on the sample.
The UVISEL 2 integrates the world’s smallest patented achromatic spot size of 35μm capable of covering a large spectral range from FUV to NIR for measurement of very small sample areas.
Driven by the DeltaPsi2 software, the UVISEL 2 is simple to operate and has the performance required characterizing all current materials as well as the next generation materials and structures.
HORIBA Scientific started with what has proven to be the most accurate and sensitive ellipsometer, the UVISEL, and redesigned and improved everything to deliver an instrument with a remarkably higher specification than any other instrument.
| Characteristic |
Point |
Standard Configuration: |
|
Light source |
150 W Xenon |
Spectral range |
190 - 880 nm
(NIR extension up to 2100 nm) |
Spot size |
Automated achromatic microspots,
8 sizes down to 35 μm (at normal incidence) |
Monochromator |
Double monochromator
For FUV-VIS range: Twin PMT detectors
For NIR extension: InGaAs detector |
Sample stage |
200 mm x 200 mm, automatic XYZ adjustment,
vacuum chucks, Z height 35 mm,
automated
autofocus and tilt alignment |
Sample viewing |
Vision system using CCD camera
Field of view: 6.5 x 3.5 mm at 70° |
Goniometer |
Automatic variable angle from 35° to 90° |
Options: |
|
Accessories |
Temperature controlled cell, liquid cell
Electrochemical cell, sealed cell, rotation stage, |
Ellipsometer table base |
Dimension (WxDxH): 1084 x 984 x 802 mm |
Performance: |
|
Tests performed on |
NIST 1000Å SiO2/Si |
Accuracy |
d: σ = 0.25Å - n(632.8 nm): σ = 0.0002 |
Repeatability |
d ± 0.25 Å - n(632.8 nm) ± 0.0002 |
Facility Requirements: |
|
|
Power supply
|
110/220 VAC, 400 W, 50/60 Hz
|
Dimension (WxDxH) |
1084 x 984 x 802 mm |
