Spectroscopic Ellipsometer Auto SE

Simple thin film measurement tool.

  • thin film analysis made easy;
  • spectral range: 440-1000 nm;
  • sample vision system.

The Auto SEis a new thin film measurement tool that allows full automatic analysis of thin film samples with simple push button operation.

Sample analysis takes only a few seconds and provides a complete report that fully describes the thin film stack – including film thicknesses, optical constants, surface roughness, and film inhomogeneities.

The Auto SE is a highly featured instrument that includes an automatic XYZ stage, real-time imaging of the measurement site and automatic selection of spot size. Many accessories are available to suit a large range of applications.

The Auto SE includes built-in diagnostic indicators for the automatic detection and diagnosis of problems, with comprehensive operator guidance for troubleshooting.

The Auto SE stands out in its ease of use and numerous automatic features that made the Auto SE a turnkey instrument ideal for routine thin film measurement and device quality control.


Product benefits:

  • Thin film analysis made easy;
  • Highly featured system;
  • Sample vision system;
  • Microspot down to 25x60 µm;
  • Large choice of accessories.
Characteristic Point

Spectral range

440-1000 nm

Spot sizes

500x500 µm; 250x500 µm; 250x250 µm; 70x250 µm;
100x100 µm; 50x60 µm; 25x60 µm

Detection
- resolution

CCD
2 nm

Sample stage
- z height

vacuum chucks
40 mm

Sample viewing
- field of view
- resolution

CCD camera
1,33x1 mm
10 µm

Goniometer

fixed at 70°
possible set up at 66° and 61,5°

Measurement time

less than 2 s
typical 5 s

Accuracy

NIST 100 nm d ± 4 Å, n(632,8 nm) ± 0,002

Repeatability

NIST 15 nm ± 0,2 Å




Яндекс.Метрика