X-ray Analytical Microscope XGT-7200

New generation of X-ray Analytical Microscopes.

  • single point analysis and automated hyperspectral imaging;
  • dual vacuum modes;
  • spot sizes from 1,2 mm to 10 µm.

The unique features of the XGT-7200 have seen this innovative micro-XRF analyzer widely embraced for a range of applications, including electronics, engine wear analysis, forensic science, geology, mineralogy, pharmaceutics, museums, metallurgy, biology, medicine and archaeology.

The flexible XGT-7200 micro-XRF system covers everything from macro analysis, for a general survey of a wide area, to the inspection of a specific micro area, with simultaneous XRF and transmission imaging. Its many features ensure high performance analysis with easy operation.

XGT-7200 features:

  • Single point and automated multi-point analyses allow high quality spectra to be acquired from either a single position, or from a number of user defined points across the sample. Element peaks are automatically located and labelled, and quantitative analysis down to ppm levels can be carried out using the fundamental parameters method (FPM), FPM with single standard, and full standard sample calibration. Thickness calculations can also be made on nm and µm thick multi-layered structures;
  • The unique x-ray guide tube technology of HORIBA provides the highest spatial resolution micro-XRF analysis, with x-ray beam diameters down to 10 µm. The high intensity, ultra-narrow beams provided by the guide tubes allow fast, non-destructive analysis of microscopic features;
  • The SmartMap imaging software records a full EDXRF spectrum at each and every pixel of the element image, enabling post-acquisition element image generation and comparison, and spectrum generation from user defined regions in the image with subsequent qualitative and quantitative characterization. Transmitted X-ray imaging provides additional insight into a sample’s structure, allowing features invisible by eye to become immediately apparent;
  • In combination with XRF imaging, the XGT-7200 allows transmitted X-ray images to be acquired. This can be used to perform internal structural analyses and identify regions of interest not visible to the eye. Scanning is done with a narrow perpendicular beam, resulting in clear penetrating images even for non-flat samples such as cylindrical parts;
  • The XGT-7200 system offers the user unique Dual Vacuum Modes for sample analysis – switching between the two modes takes just a few seconds. In Full Vacuum Mode the entire sample chamber is subjected to vacuum conditions to ensure the ultimate sensitivity to light elements. In Partial Vacuum Mode the sample is maintained at atmospheric pressure whilst a vacuum is drawn around the detector and capillary optics. This mode is ideally suited for analysis of water containing samples such as biological tissue, and fragile archaeological/museum objects;
  • The accommodating sample chamber enables a wide range of samples to be analyzed, from a 10 µm spot analysis on a microscopic feature, to mapped analysis of areas as large as 10 x 10 cm;
  • Intuitive software allows easy control of instrument hardware, fast sample visualization and selection of measurement region, and full data analysis. Functions include automated peak identification, quantitative measurements, RGB composite image generation, line profile analysis.
Parameters Values


Na to U

X-ray tube

Rh target, Tube voltage 50kV, Tube current 1mA

Fluorescent X-ray detector

Peltier cooled Silicon Drift Detector (SDD)

Transmitted X-ray detector

NaI (Tl) scintilltor

X-ray guide tube

Mono capillary 10μm / 100μm with no filter

Optical image

Full sample optical image and coaxial magnification image

Sample stage size

XY: 100 x 100 mm

Sample chamber

Vacuum chamber model/ Max 300 x 300 x 80mm in vacuum

Signal processing

Digital pulse processor (INCA unit)

Qualitative analysis

Auto identification, KLM marker
Peak search
Compare spectrum

Quantitative analysis

Non standard FPM, Standard FPM
Standard file matching FPM, Calibration curve
Multilayer FPM (Thickness gage), Multi point analysis (Max5000)
Multi point result send to Excel, XGT-5000 spectrum view

Mapping function

Transmitted X-ray image, Elemental image, Spectrum mapping
Rectangle mapping, Generate spectrum, RGB composition
Scale maker, Line analysis