Scanning Probe Microscope AIST SmartSPM

The fastest SPM on the market with 100 um scanning field.

  • fully automated laser to photodiode alignment;
  • unique fast scanner with 100 um field goes down to molecular resolution;
  • IR laser 1300 nm wavelength allows to measure photosensitive samples.

The SmartSPM Scanning Probe Microscope is the first 100% automated system that offers its cutting-edge technology of ultra-fast, metrological and high resolution measurements for the most advanced materials research at the nano scale in all AFM and STM modes.

Automation of operation and Ease of use
Fully automated laser to photodiode alignment (no user click-on-spot is required!). Exchanging probes has never been so easy before! Fully automated configuration for the most common AFM modes. Extremely fast system adjustment before starting measurements!

Resolution / Stability / Accuracy
One single 100 um scanner gets large scans as well as goes down to molecular or atomic resolution. No vibration isolation is required for standard measurements. The lowest noise closed loop sensors make it possible to have them on even during molecular resolution imaging and get the most accurate results.

Fast scanning
Scanner resonant frequencies >7 kHz in XY and >15 kHz in Z are the highest in the AFM industry today. Optimized scanner control algorithms makes it possible to scan much faster than ever before!

All SPM modes with no additional units and costs
Kelvin Probe Microscopy, Piezoresponse Force Microscopy, Nanolithography and Nanomanipulation are all included in the basic package!

A Flexibility to upgrade to AFM-Raman
The SmartSPM was designed from the ground up for easy and appropriate coupling with Raman systems!

Parameters Value

Measuring Modes

Contact AFM in air/(liquid optional); Semicontact AFM in air/(liquid optional);
True Non-contact AFM; Phase Imaging; Lateral Force Microscopy (LFM);
Force Modulation; Conductive AFM (optional); Magnetic Force Microscopy (MFM);
Kelvin Probe (Surface Potential Microscopy); Capacitance and Electric Force Microscopy (EFM);
Force curve measurements; Piezo Response Force Microscopy; Nanolithography; Nanomanipulation;
STM (optional); Photocurrent Mapping (optional); Volt-ampere characteristic measurements (optional)


Scanning range 100 x 100 x 15 um ±10%
Scanning type by sample
Digital closed loop control for X, Y, Z axes


Motorized approach range 18 mm
Maximum sample size: 40x50 mm, 15 mm thickness
Motorized sample positioning range 5x5 mm

AFM Head

Laser wavelength 1300 nm
Fully motorized
Top and side simultaneous optical access with planapochromat objectives
Registration system noise: He001 <0.03 nm, He002 <0.1 nm

Controller electronics

Modular fully digital expandable controller
High speed DSP 300 MHz
USB 2.0 interface


Macro language Lua for programming user functions
DSP macro language to program controller
Image processing, fitting and polynomial smoothing up to 8 degree
FFT processing, filtration and analysis


Liquid cell with temperature control: heating up to 60°C
Conductive AFM unit: сurrent range 100 fA to 10 uA
Optical microscope: resolution up to 1 um
Vibration isolation: dynamic Isolation 0,7 Hz to 1 kHz, maximum load 150kg
Compatibility with optical systems
Upgradeability to AFM/Raman for spectroscopic and TERS operation